Model NO.: FF-160
Outlet Flange: Kf 40 (Dn)
Inlet Flange: Dn160
Bearing Type: Ceramic
Run-up Time(Min.): <6
Vib(Um): ≤ 0.1
Cooling Method: Water
Rotation Speed(Rpm): 36000
Name: Oil Free High Vacuum Pump
Trademark: CY
Transport Package: Wooden Box
Specification: 600L/S
Origin: Zhengzhou, China
HS Code: 8414100090
Model NO.: FF-160
Outlet Flange: Kf 40 (Dn)
Inlet Flange: Dn160
Bearing Type: Ceramic
Run-up Time(Min.): <6
Vib(Um): ≤ 0.1
Cooling Method: Water
Rotation Speed(Rpm): 36000
Name: Oil Free High Vacuum Pump
Trademark: CY
Transport Package: Wooden Box
Specification: 600L/S
Origin: Zhengzhou, China
HS Code: 8414100090
High speed turbo vacuum pump1.High speed turbo vacuum pump(600L/S) is directly equipped into a station as picture show for max. vacuum level
2.Heavy duty dual stage mechanical pump, 220 liters/minute (7.8CFM) is connected to turbo pump for faster pumping speed
3.Mobile pump station is included and the compact sputtering coater can be placed on top of station
4.Max. vacuum level: 10^-6 torr with chamber baking
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Model | FF-160 |
Pumping Speed(/l/s,Air) | 600 |
Inlet Flange | DN160 ISO-K |
Outlet Flange | KF 40 (DN) |
Ultimate Vacuum(Pa) | ≤ 6x10-4Pa |
Rotation Speed(rpm) | 36000 |
Run-Up Time(min.) | <Â 6 |
Bearing Type | Ceramic |
VIB(um) | ≤ 0.1 |
Backing Pump (l/s) | 4-8 |
Cooling Method,optional | Water |
Cooling Water Temperature(ºC) | ≤ 25 |
Bake-out temperature(ºC) | ≤ 100 |
Ambient Temperature (ºC) | S-40 |
Lubrication | Oil |
Mounting or lentation | Vertical ±5° |
 High speed turbo vacuum pump
1.High speed turbo vacuum pump(600L/S) is directly equipped into a station as picture show for max. vacuum level
2.Heavy duty dual stage mechanical pump, 220 liters/minute (7.8CFM) is connected to turbo pump for faster pumping speed
3.Mobile pump station is included and the compact sputtering coater can be placed on top of station
4.Max. vacuum level: 10^-6 torr with chamber baking
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Model | FF-160 |
Pumping Speed(/l/s,Air) | 600 |
Inlet Flange | DN160 ISO-K |
Outlet Flange | KF 40 (DN) |
Ultimate Vacuum(Pa) | ≤ 6x10-4Pa |
Rotation Speed(rpm) | 36000 |
Run-Up Time(min.) | <Â 6 |
Bearing Type | Ceramic |
VIB(um) | ≤ 0.1 |
Backing Pump (l/s) | 4-8 |
Cooling Method,optional | Water |
Cooling Water Temperature(ºC) | ≤ 25 |
Bake-out temperature(ºC) | ≤ 100 |
Ambient Temperature (ºC) | S-40 |
Lubrication | Oil |
Mounting or lentation | Vertical ±5° |
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